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高分辨率场发射扫描电镜 |
High Resolution Field Emission Scanning Electron Microscopy |
型 号:NOVA NanoSEM 430
功 能:
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导电和非导电样品的高分辨率形貌观察,并可背散射电子成像 Morphological observation for conducting and insulating samples with high resolution, and imaging using back-scattered electrons
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配备Oxford X-Max 80能谱仪,可检测成分、探测成分分布 Detection and mapping of elements in samples with the Oxford X-Max 80 energy dispersive spectrometer (EDS) equipped
主要指标:
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分辨率(Resolution):≤ 1.0 nm @ 15 kV; ≤ 1.6 nm @ 1.0 kV
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观察范围(Viewfield):100 mm ×100 mm
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样品台倾角(Tilting angles):-5° ~ + 70°
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配备能谱仪(EDS):超大面积电制冷硅飘逸探测器 (Si drift detector with 80 mm2 super ATW window electrically cooled )
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能谱分辨率(Energy resolution):≦129 eV(MnKα, 40000 cps)
技术特点:

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