研究和任务

1.物理、化学、生物和新材料等领域所涉及的微/纳结构及器件的加工

2.针对不同材料的新型加工工艺的研究

3.基于新型微纳系统的交叉研究

4.纳系统的集成技术和工艺研究

5.针对企业和科研单位的小批量加工服务

1. Fabrication of micro- and nano - structures for research in physics, chemistry,biology and
　 new materials

2. Development of new processes in various materials

3. Multidisciplinary research on new micro- and nano- systems

4. Integration techniques of micro- and nano- systems

5. Fabrication of small batch of products for industry and research institutions

纳米加工技术实验室