论文

Fabrication of single-crystal silicon nanotubes with sub-10 nm walls using cryogenic inductively coupled plasma reactive ion etching

论文编号:

作者:

Li, ZQ

刊物名称:

Nanotechnology

所属学科:

论文题目英文:

Fabrication of single-crystal silicon nanotubes with sub-10 nm walls using cryogenic inductively coupled plasma reactive ion etching

年:

2016

卷:

27

期:

36

页:

365302

联系作者:

Chu, WG; Duan, HG

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影响因子:

参与作者:

备注: