论文

A thin film thermoelectric device fabricated by a self-aligned shadow mask method

论文编号:

作者:

Weiguo Chu

刊物名称:

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

所属学科:

论文题目英文:

A thin film thermoelectric device fabricated by a self-aligned shadow mask method

年:

2017

卷:

27

期:

5

页:

55005（1-8）

联系作者:

Weiguo Chu

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